Semiconductor Industry

Purity is our highest command…

The German semiconductor industry is currently one of the most dynamically growing markets.
The greatest challenge during pressure measurement is maintaining purity and tightness. This can be achieved, for example by using VCR-connections.

Our Flow-Through pressure gauge fulfills the highest requirements of the semiconductor industry. Ordinary Bourdon tube pressure gauges have considerable disadvantages when cleaning the wetted parts because of its geometry, for example the closed end of the Bourdon tube. Our Flow-Through pressure gauge provides 2 oppositely positioned electropolished VCR-connections, with increased surface finish, reducing dead space.
The rinsing property is significantly improved by this and the flushing time is reduced dramatically. This innovative instrument configuration enables an effective use of the resources.

Application fields semiconductor industry

  • Manufacturer of technical gases
  • Gas distribution systems
 

Instrument recommendations

Pressure measurement

1619.2 Semiconductor industry
Bourdon tube pressure gauge
(RSCh 63)


bayonet ring case stainless steel 
safety category S3 according to EN 837-1 
with indirect limit switches (models E / I)
1619.4 Semiconductor industry
Bourdon tube pressure gauge
(RSCh 63)


bayonet ring case stainless steel 
safety category S3 according to EN 837-1 
with indirect limit switch (model R)

Temperature measurement

 

Approvals