Semiconductor Industry

Purity is our highest command…

The German semiconductor industry is currently one of the most dynamically growing markets.
The greatest demands are being made to the purity and density, for example by the application of VCR-connections.

An ordinary bourdon tube pressure gauge has considerable disadvantages because of its geometry, for example at the end of the closed bourdon tube, when cleaning the wetted parts. Our Flow-Through pressure gauge is provided with 2 oppositely positioned VCR-connections that have an increased surface finish and an electropolished medium-volume, which is free of dead-space.
The rinsing property is significantly improved by this and the scavenging time is reduced dramatically. This innovative instrument configuration supports an effective use of the resources.

Application fields semiconductor industry

  • Manufacturer of technical gases
  • Gas distribution systems
 

Instrument recommendations

Pressure measurement

1619.2 Semiconductor industry
Bourdon tube pressure gauge
(RSCh 63)


bayonet ring case stainless steel 
safety category S3 according to EN 837-1 
with indirect limit switches (models E / I)
1619.4 Semiconductor industry
Bourdon tube pressure gauge
(RSCh 63)


bayonet ring case stainless steel 
safety category S3 according to EN 837-1 
with indirect limit switch (model R)

Temperature measurement

 

Approvals